Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique

被引:61
|
作者
Prenitzer, BI [1 ]
Giannuzzi, LA
Newman, K
Brown, SR
Irwin, RB
Shofner, TL
Stevie, FA
机构
[1] Univ Cent Florida, Dept Mech Mat & Aerosp Engn, Orlando, FL 32816 USA
[2] Keystone Powdered Met Co, Proc Dev, St Marys, PA 15857 USA
[3] Cirent Semicond, Orlando, FL 32819 USA
[4] Kirk Resources, Orlando, FL 32819 USA
[5] Bartech Grp, Orlando, FL 32819 USA
关键词
Material Transaction; Transmission Electron Micro Specimen; Metal Powder Industry Federation; Scanning Electron Microscopy Specimen; Transmission Electron Micro Specimen Preparation;
D O I
10.1007/s11661-998-0116-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Particles of Zn powder have been studied to show that high-quality scanning electron microscope (SEM) and transmission electron microscope (TEM) specimens can be rapidly produced from a site-specific region on a chosen particle by the focused ion beam (FIB) lift-out technique. A TEM specimen approximately 20-mu m long by 5-mu m wide was milled to electron transparency, extracted from the bulk particle, and micromanipulated onto a carbon coated copper mesh TEM grid. Using the FIB lift-out method, we were able to prepare a site-specific TEM specimen from a difficult material in under 3 hours. The TEM analysis of the lift-out specimen revealed a large amount of thin area free from characteristic signs of damage that may be observed as a result of conventional argon ion milling. The overall microstructure of the specimen prepared by the FIB lift-out method was consistent with samples prepared by conventional metallographic methods. A grain size of similar to 10 to 20 mu m was observed in all specimens by both TEM and SEM analysis. Light optical microscopy revealed the presence of internal voids in similar to 10 to 20 pct of all particles. The SEM analysis showed the voids to extend over similar to 70 pct of the particle volume in some cases.
引用
收藏
页码:2399 / 2406
页数:8
相关论文
共 50 条
  • [41] Analysis of internal structure of mineral dust using focused ion beam and transmission electron microscope
    Ueda, Sayako
    Kato, Hiroki
    Miura, Kazuhiko
    29TH SYMPOSIUM ON AEROSOL SCIENCE AND TECHNOLOGY, 2012, 2012, : 201 - 202
  • [42] Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
    Rubino, Stefano
    Melin, Petter
    Spellward, Paul
    Leifer, Klaus
    JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 2014, (89):
  • [43] A plasma-polymerized protective film for transmission electron microscopy specimen preparation by focused ion beam etching
    Kato, NI
    Miura, N
    Tsutsui, N
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1127 - 1130
  • [44] Focused ion beam sectioning and lift-out method for copper and resist vias in organic low-k dielectrics
    Crawford, EJ
    Gignac, L
    Barth, K
    Petrus, J
    Levine, E
    MICROSCOPY AND MICROANALYSIS, 2002, 8 (06) : 502 - 508
  • [45] PREPARATION OF TRANSMISSION AND SCANNING ELECTRON MICROSCOPE SPECIMENS USING ION BEAM THINNING.
    Morris, Francis William
    1600, (21):
  • [46] Development of electron optical system using annular pupils for scanning transmission electron microscope by focused ion beam
    Matsutani, Takaomi
    Yasumoto, Tsuchika
    Tanaka, Takeo
    Kawasaki, Tadahiro
    Ichihashi, Mikio
    Ikuta, Takashi
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 : 145 - 148
  • [47] Using the in situ lift-out technique to prepare TEM specimens on a single-beam FIB instrument
    Lekstrom, M.
    McLachlan, M. A.
    Husain, S.
    McComb, D. W.
    Shollock, B. A.
    EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007, 2008, 126
  • [48] Cross-sectional specimen preparation and observation of a plasma sprayed coating using a focused ion beam/transmission electron microscopy system
    Yaguchi, T
    Kamino, T
    Sasaki, M
    Barbezat, G
    Urao, R
    MICROSCOPY AND MICROANALYSIS, 2000, 6 (03) : 218 - 223
  • [49] Method for cross-sectional transmission electron microscopy specimen preparation of composite materials using a dedicated focused ion beam system
    Yaguchi, T
    Kamino, T
    Ishitani, T
    Urao, R
    MICROSCOPY AND MICROANALYSIS, 1999, 5 (05) : 365 - 370
  • [50] Field-ion specimen preparation using focused ion-beam milling
    Larson, DJ
    Foord, DT
    Petford-Long, AK
    Liew, H
    Blamire, MG
    Cerezo, A
    Smith, GDW
    ULTRAMICROSCOPY, 1999, 79 (1-4) : 287 - 293