Pulsed laser deposition of ZnO thin films on silicon and sapphire

被引：3
|
作者：
Khudobenko, AI [1 ]
Zherikhin, AN [1 ]
Williams, RT [1 ]
Wilkinson, J [1 ]
Ucer, KB [1 ]
Xiong, G [1 ]
Voronov, VV [1 ]
机构：
[1] RAS, Inst Laser & Informat Technol, Troitsk 142190, Moscow Region, Russia
来源：
LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES | 2003年 / 5121卷
关键词：
pulsed laser deposition; zinc oxide; photoluminescence;
D O I：
10.1117/12.515618
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We investigated pulsed laser deposition (PLD) of ZnO films on silicon and sapphire substrates. Photoluminescence (PL), electrical properties and crystal structure of films were investigated. Stimulated emission in region 400 nm was observed.
引用
收藏
页码：317 / 324
页数：8
相关论文
共 50 条
  • [21] Pulsed laser deposition of ZnO thin films using a femtosecond laser
    Okoshi, M
    Higashikawa, K
    Hanabusa, M
    APPLIED SURFACE SCIENCE, 2000, 154 : 424 - 427
  • [22] ZnO THIN FILMS BY PULSED LASER DEPOSITION WITH APPLICATIONS IN SENSORS
    Constantinoiu, Izabela
    Viespe, Cristian
    Busuioc, Cristina
    Jinga, Sorin-Ion
    UPB Scientific Bulletin, Series B: Chemistry and Materials Science, 2024, 86 (01): : 119 - 134
  • [23] ZnO THIN FILMS BY PULSED LASER DEPOSITION WITH APPLICATIONS IN SENSORS
    Constantinoiu, Izabela
    Viespe, Cristian
    Busuioc, Cristina
    Jinga, Sorin-Ion
    UNIVERSITY POLITEHNICA OF BUCHAREST SCIENTIFIC BULLETIN SERIES B-CHEMISTRY AND MATERIALS SCIENCE, 2024, 86 (01): : 119 - 134
  • [24] Fabrication of ZnO thin films by femtosecond pulsed laser deposition
    Chau, Joseph Lik Hang
    Yang, Min-Chieh
    Nakamura, Takahiro
    Sato, Shunichi
    Yang, Chih-Chao
    Cheng, Chung-Wei
    OPTICS AND LASER TECHNOLOGY, 2010, 42 (08): : 1337 - 1339
  • [25] Pulsed laser deposition of thin films and superlattices based on ZnO
    Ohtomo, A
    Tsukazaki, A
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (04) : S1 - S12
  • [26] Pulsed laser deposition of ZnO and Mn-doped ZnO thin films
    de Posada, E
    Tobin, G
    McGlynn, E
    Lunney, JG
    APPLIED SURFACE SCIENCE, 2003, 208 : 589 - 593
  • [27] Pulsed laser deposition of silicon containing carbon thin films
    Lackner, JM
    Waldhauser, W
    Ebner, R
    Fian, A
    Jakopic, G
    Leising, G
    Schöberl, T
    SURFACE & COATINGS TECHNOLOGY, 2004, 177 : 360 - 364
  • [28] Growth of ZnO nanocrystals by pulsed laser deposition on sapphire and silicon and the infrared spectra of the nanocrystals
    Bazhenov, A. V.
    Fursova, T. N.
    Maksimuk, M. Yu.
    Kaidashev, E. M.
    Kaidashev, V. E.
    Misochko, O. V.
    SEMICONDUCTORS, 2009, 43 (11) : 1532 - 1538
  • [29] Growth of ZnO nanocrystals by pulsed laser deposition on sapphire and silicon and the infrared spectra of the nanocrystals
    A. V. Bazhenov
    T. N. Fursova
    M. Yu. Maksimuk
    E. M. Kaidashev
    V. E. Kaidashev
    O. V. Misochko
    Semiconductors, 2009, 43 : 1532 - 1538
  • [30] Pulsed laser deposition of InP thin films on sapphire(1000) and GaAs(100)
    Hafez, MA
    Elamrawi, KA
    Elsayed-Ali, HE
    APPLIED SURFACE SCIENCE, 2004, 233 (1-4) : 42 - 50
12345