Pulsed laser deposition of ZnO thin films on silicon and sapphire

被引：3
|
作者：
Khudobenko, AI [1 ]
Zherikhin, AN [1 ]
Williams, RT [1 ]
Wilkinson, J [1 ]
Ucer, KB [1 ]
Xiong, G [1 ]
Voronov, VV [1 ]
机构：
[1] RAS, Inst Laser & Informat Technol, Troitsk 142190, Moscow Region, Russia
来源：
LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES | 2003年 / 5121卷
关键词：
pulsed laser deposition; zinc oxide; photoluminescence;
D O I：
10.1117/12.515618
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We investigated pulsed laser deposition (PLD) of ZnO films on silicon and sapphire substrates. Photoluminescence (PL), electrical properties and crystal structure of films were investigated. Stimulated emission in region 400 nm was observed.
引用
收藏
页码：317 / 324
页数：8
相关论文
共 50 条
  • [1] Growth of crystalline ZnO thin films on silicon (100) and sapphire (0001) by pulsed laser deposition
    Lu, YF
    Ni, HQ
    Ren, ZM
    Wang, WJ
    Chong, TC
    Low, TS
    Cheng, BA
    Wang, JP
    Jie, YX
    JOURNAL OF LASER APPLICATIONS, 2000, 12 (02) : 54 - 58
  • [2] Studies of ZnO Thin Films On Sapphire (0001) Substrates Deposited by Pulsed Laser Deposition
    F. K. Shan
    Z. F. Liu
    G. X. Liu
    W. J. Lee
    G. H. Lee
    I. S. Kim
    B. C. Shin
    Y. S. Yu
    Journal of Electroceramics, 2004, 13 : 189 - 194
  • [3] Studies of ZnO thin films on sapphire (0001) substrates deposited by pulsed laser deposition
    Shan, FK
    Liu, ZF
    Liu, GX
    Lee, WJ
    Lee, GH
    Kim, IS
    Shin, BC
    Yu, YS
    JOURNAL OF ELECTROCERAMICS, 2004, 13 (1-3) : 189 - 194
  • [4] Temperature dependent photoluminescence processes in ZnO thin films grown on sapphire by pulsed laser deposition
    Misra, P.
    Sharma, T. K.
    Kukreja, L. M.
    CURRENT APPLIED PHYSICS, 2009, 9 (01) : 179 - 183
  • [5] Laser deposition of ZnO films on silicon and sapphire substrates
    Zherikhin, AN
    Khudobenko, AI
    Williams, RT
    Wilkinson, J
    User, KB
    Xiong, G
    Voronov, VV
    QUANTUM ELECTRONICS, 2003, 33 (11) : 975 - 980
  • [6] Comparison of ZnO thin films grown by pulsed laser deposition on sapphire and Si substrates
    Han, L.
    Mei, F.
    Liu, C.
    Pedro, C.
    Alves, E.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (03) : 699 - 704
  • [7] Characterization of nitrogen-doped ZnO thin films grown by plasma-assisted pulsed laser deposition on sapphire substrates
    Chakrabarti, S.
    Doggett, B.
    O'Haire, R.
    McGlynn, E.
    Henry, M. O.
    Meaney, A.
    Mosnier, J.-P.
    SUPERLATTICES AND MICROSTRUCTURES, 2007, 42 (1-6) : 21 - 25
  • [8] Pulsed laser deposition of ZnO and Mn-doped ZnO thin films
    de Posada, E
    Tobin, G
    McGlynn, E
    Lunney, JG
    APPLIED SURFACE SCIENCE, 2003, 208 : 589 - 593
  • [9] ZnO thin films prepared by pulsed laser deposition
    Tsoutsouva, M. G.
    Panagopoulos, C. N.
    Papadimitriou, D.
    Fasaki, I.
    Kompitsas, M.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2011, 176 (06): : 480 - 483
  • [10] Thin ZnO films produced by pulsed laser deposition
    Dikovska, AO
    Atanasov, PA
    Vasilev, C
    Dimitrov, IG
    Stoyanchov, TR
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2005, 7 (03): : 1329 - 1334
12345