A 3 PPM/°C TEMPERATURE COEFFICIENT OF SCALE FACTOR FOR A SILICON RESONANT ACCELEROMETER BASED ON CRYSTALLOGRAPHIC ORIENTATION OPTIMIZATION

We propose a method for improving the temperature stability of the scale factor for silicon resonant accelerometer (SRA) based on crystallographic orientation optimization for the first time. The approach is a passive compensation per se that changes the temperature drift of Young's modulus via rotating the vibration axis of the device to a specific crystal orientation angle, thereby significantly reducing the temperature coefficient of the scale factor (TCS). Experimental results show that a TCS of 3ppm/degrees C is obtained with a 33.75 degrees orientation SRA without any post-processing compensation, which is similar to 8.6-fold reduced compared with the conventional 0 degrees orientation device and show good agreement with the simulation results. Moreover, the overall variation of the scale factor can be further decreased to only 2.98ppm from-10 degrees C to 70 degrees C after simple polynomial compensation, which is a considerably competitive result among the previously reported results in literatures.