Thin film elements design: software and possibilities of femtosecond laser techniques

被引：5

作者：

Chkalov, R., V ^{[1
]}

Khorkov, K. S. ^{[1
]}

Kochuev, D. A. ^{[1
]}

Prokoshev, V. G. ^{[1
]}

Davydov, N. N. ^{[1
]}

机构：

[1] Vladimir State Univ, Gorky Str 87, Vladimir 600000, Russia

来源：

BEAM TECHNOLOGIES AND LASER APPLICATION | 2018年 / 1109卷

基金：

俄罗斯基础研究基金会;

关键词：

ABLATION;

D O I：

10.1088/1742-6596/1109/1/012029

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper we consider the possibilities of thin-film coatings micromachining by femtosecond laser radiation (wavelength lambda = 1030 nm, pulse repetition frequency f = 10 kHz, Emax pulse energy approximate to 150 mu J, pulse duration tau approximate to 280 fs) for elements of microelectronics and optoelectronics. Using self-developed software the thin film elements with a given geometry were designed and formed on a surface of the quartz substrate. Examples of the microelements formation by selective laser ablation of a samples with deposited metal coating are shown.

引用

页数：7

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