Implementation of SMIF/minienvironment technology - Theory and reality

Four production lines with SMIF/minienvironment technology have been constructed in Europe over the last two years (Fraunhofer-ISiT, Philips Nijmegen, GEC Plessey Plymouth, Siemens North Tyneside) and further fabs are planned. The SMIF/minienvironment concept for microelectronic production lines is being increasingly used not only in Europe but also worldwide. A crucial factor in the realization of an economical SMIF/minienvironment is the planning phase, where experience in recent years has shown that the general approach to a SMIF/minienvironment project must aim for process equipment with an integrated SMIF/minienvironment solution. It is necessary to pursue the integrated concept right from the beginning of the planning phase in order to achieve high reliability from a SMIF-automated production line. The main requirement of the philosophy is to provide process equipment with integrated SMIF/minienvironment solutions. It is vital to a SMIF project to discuss with the vendors whether their pieces of equipments are purchased using the OEM SMIF/minienvironment products as an integrated part of the equipment. This paper describes the experiences obtained and problems encountered when a SMIF/minienvironment production line with a high number of integrated SMIF/minienvironment process equipment solutions was purchased and put into operation. Further information obtained from several projects by the Fraunhofer project team gave the impression that SMIF/minienvironment production lines worldwide function largely on a compromise basis and that many problems remain unsolved. If users could be made more aware of the typical problems, SMIF/minienvironment systems could become considerably more efficient.