Analysis of the crystal-grain and grain-boundary phase in aluminium nitride by selected dissolution

被引:0
作者
Yabuki, M [1 ]
Hayashi, M [1 ]
Kasori, M [1 ]
Endo, H [1 ]
Kozuka, S [1 ]
机构
[1] TOSHIBA RES CONSULTING CORP,SAIWAI KU,KAWASAKI,KANAGAWA 210,JAPAN
关键词
selected dissolution; grain boundary phase; aluminium nitride;
D O I
暂无
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A selected-dissolution method was investigated in order to analyze a crystal-grain and grain-boundary phase in aluminium nitride which was used as a high thermal-conductivity substrate. Unreacted Y2O3 in the sample was dissolved by 1.5 M hydrochloric acid. A crystal in the residual sample after hydrochloric acid dissolution was dissolved by 2 M sodium hydroxide. The residue which was not dissolved by them was used to determine the grain-boundary phase. EDTA titration, acid-base titration, ICP-AES and X-ray diffraction were used to analyze the composition of the crystal-grain and grain-boundary phase. In the aluminium nitride, to which Y2O3 was added, two grain-boundary phases were constructed (Y3Al5O12 and YAlO3). Also, it was confirmed that they influence the thermal conductivity.
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收藏
页码:1133 / 1137
页数:5
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