10-Gb/s Ge/SiGe Multiple Quantum-Well Waveguide Photodetector

被引:24
作者
Chaisakul, Papichaya [1 ]
Marris-Morini, Delphine [1 ]
Isella, Giovanni [2 ]
Chrastina, Daniel [2 ]
Rouifed, Mohamed-Said [1 ]
Le Roux, Xavier [1 ]
Edmond, Samson [1 ]
Cassan, Eric [1 ]
Coudevylle, Jean-Rene [1 ]
Vivien, Laurent [1 ]
机构
[1] Univ Paris 11, Inst Elect Fondamentale, CNRS, UMR 8622, F-91405 Orsay, France
[2] Politecn Milan, Dipartimento Fis, Lab Epitaxial Nanostruct Silicon & Spintron, L NESS, I-22100 Polo Di Como, Como, Italy
关键词
Ge/SiGe; integrated optoelectronics; multiple quantum wells; silicon photonics; SILICON; ELECTROABSORPTION; HETEROSTRUCTURES; PHOTONICS; MODULATOR;
D O I
10.1109/LPT.2011.2162724
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors report on high speed operation of a Ge/SiGe multiple quantum-well waveguide photodetector. At -3 V, 10 Gb/s operation is demonstrated at wavelengths of 1405 and 1420 nm with a responsivity as high as 0.8 A/W. The device, 3 mu m wide and 80 mu m long, exhibits a dark current of 474 nA at a reverse bias of -1 V. These results pave the way for the use of Ge/SiGe multiple quantum-well structures as efficient active waveguide devices in silicon compatible integrated circuits.
引用
收藏
页码:1430 / 1432
页数:3
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