Phase-shifting lateral shearing interferometer with two pairs of wedge plates

被引：40

作者：

Lee, HH ^{[1
]}

You, JH ^{[1
]}

Park, SH ^{[1
]}

机构：

[1] Yonsei Univ, Coll Sci, Natl Res Lab Nonlinear Opt, Seoul 120749, South Korea

来源：

OPTICS LETTERS | 2003年 / 28卷 / 22期

关键词：

D O I：

10.1364/OL.28.002243

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance. (C) 2003 Optical Society of America.

引用

页码：2243 / 2245

页数：3

共 16 条

[1]

CHO WJ, 1997, OPT ENG, V36, P3

[2] Phase-shifting shearing interferometer [J].

Griffin, DW .

OPTICS LETTERS, 2001, 26 (03) :140-141

[3]

Hardy J. W., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V816, P180, DOI 10.1117/12.941765

[4] SIMPLE LASER INTERFEROMETER WITH VARIABLE SHEAR AND TILT [J].

HARIHARAN, P .

APPLIED OPTICS, 1975, 14 (05) :1056-1057

[5] Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer [J].

Leibbrandt, GWR ;

Harbers, G ;

Kunst, PJ .

APPLIED OPTICS, 1996, 35 (31) :6151-6161

[6]

MANTRAVADI MV, 1992, OPTICAL SHOP TESTING, pCH4

[7] USE OF SINGLE PLANE PARALLEL PLATE AS LATERAL SHEARING INTERFEROMETER WITH VISIBLE GAS LASER SOURCE [J].

MURTY, MVR .

APPLIED OPTICS, 1964, 3 (04) :531-&

[8]

MURTY MVR, 1970, APPL OPTICS, V9, P5

[9]

PAEZ G, 2000, APPL OPTICS, V39, P28

[10] EVALUATION OF LARGE ABERRATIONS USING A LATERAL-SHEAR INTERFEROMETER HAVING VARIABLE SHEAR [J].

RIMMER, MP ;

WYANT, JC .

APPLIED OPTICS, 1975, 14 (01) :142-150

← 1 2 →