PDMS/alumina nanocomposite for ceramic microcomponents and microfluidic devices

被引：0

作者：

Metz, S ^{[1
]}

Bertsch, A ^{[1
]}

Renaud, P ^{[1
]}

机构：

[1] Dyconex AG, Adv Circuit Technol, CH-8303 Bassersdorf, Switzerland

来源：

Micro Total Analysis Systems 2004, Vol 2 | 2005年 / 297期

关键词：

PDMS; alumina; molding; ceramic; microfluidic;

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We present ceramic microfluidic devices fabricated from PDMS/alumina nanocomposites. The well-known pattern replication capabilities of PDMS are exploited to create high-aspect ratio ceramic microstructures with dimensions between 2 and 500 mu m. The two-step fabrication process involves soft molding of the PDMS/alumina base material on SU-8 masters followed by a debinding/sintering step. Microfluidic devices for high temperature applications can easily be obtained by joining the molded, un-sintered material prior to the sintering step.

引用

页码：366 / 368

页数：3

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