Grazing incidence diffraction by epitaxial multilayered gratings

被引：11

作者：

Baumbach, GT

Lubbert, D

Pietsch, U

Darowski, N

Leprince, L

Talneau, A

Schneck, J

机构：

[1] Fraunhofer Inst Zerstorungsfreie Prufverfahren, EADQ, D-01326 Dresden, Germany

[2] Univ Potsdam, Inst Phys, D-14415 Potsdam, Germany

[3] France Telecom, CNET, LA CNRS 250, F-92220 Bagneux, France

来源：

PHYSICA B | 1998年 / 248卷

关键词：

grazing incidence diffraction; epitaxial multilayered gratings;

D O I：

10.1016/S0921-4526(98)00262-2

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Multilayered gratings have been investigated by high-resolution grazing incidence diffraction, employing noncoplanar triple crystal diffractometry. A theoretical treatment has been developed based on the distorted wave Born approximation for multilayer diffraction. Grazing incidence diffraction reveals as an optimal complement to symmetrical and asymmetrical high-resolution X-ray diffraction. The method allows to measure separately the influences of the lateral strain and the grating shape. Depth selective studies have been performed by surface gratings and buried gratings showing for the first time the evolution of the strain relaxation phenomena in strained InGaAsP surface gratings resulting from burying in InP. (C) 1998 Published by Elsevier Science B.V. All rights reserved.

引用

页码：343 / 348

页数：6