Characteristics of thin film inductors using magnetic multilayered films with ceramic intermediate layers

被引：4
作者：
Tang, XL [1 ]
Zhang, HW [1 ]
Su, H [1 ]
Shi, Y [1 ]
Jiang, XD [1 ]
机构：
[1] Univ Elect Sci & Technol China, Inst Microelect & Solid State Elect, Chengdu 610054, Peoples R China
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 294卷 / 01期
基金：
中国国家自然科学基金;
关键词：
thin film inductor; multilayered films; resonance frequency; quality factor;
D O I：
10.1016/j.jmmm.2004.12.020
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Circular spiral thin film inductors were fabricated using as-deposited magnetic multilayered films with ceramic intermediate layers, and a thin film inductor with a single magnetic layer was also fabricated for comparison. The magnetic multilayered films have good soft magnetic properties and high resistivity thus can decrease the eddy current loss. Employing the magnetic multilayered films, we got a higher quality factor (> 30) and better inductor characteristics as compared with the inductor with a single magnetic layer, such as a high operating frequency (> 80 MHz) without decreasing the inductance. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：49 / 52
页数：4
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