Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

被引：49

作者：

Chao, WL ^{[1
]}

Anderson, E

Denbeaux, GP

Harteneck, B

Liddle, JA

Olynick, DL

Pearson, AL

Salmassi, F

Song, CY

Attwood, DT

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA

来源：

OPTICS LETTERS | 2003年 / 28卷 / 21期

关键词：

D O I：

10.1364/OL.28.002019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.

引用

页码：2019 / 2021

页数：3

共 20 条

[1] Nanofabrication and diffractive optics for high-resolution x-ray applications [J].

Anderson, EH ;

Olynick, DL ;

Harteneck, B ;

Veklerov, E ;

Denbeaux, G ;

Chao, WL ;

Lucero, A ;

Johnson, L ;

Attwood, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :2970-2975

[2]

Attwood D., 1999, SOFT XRAYS EXTREME U

[3] MOLYBDENUM-SILICON MULTILAYER MIRRORS FOR THE EXTREME ULTRAVIOLET [J].

BARBEE, TW ;

MROWKA, S ;

HETTRICK, MC .

APPLIED OPTICS, 1985, 24 (06) :883-886

[4]

BORN M, 1999, PRINCIPLES OPTICS, P441

[5] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].

BRAVMAN, JC ;

SINCLAIR, R .

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61

[6] Soft X-ray microscopy to 25 nm with applications to biology and magnetic materials [J].

Denbeaux, G ;

Anderson, E ;

Chao, W ;

Eimüller, T ;

Johnson, L ;

Köhler, M ;

Larabell, C ;

Legros, M ;

Fischer, P ;

Pearson, A ;

Schültz, G ;

Yager, D ;

Attwood, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 :841-844

[7] Study of in-plane magnetic domains with magnetic transmission x-ray microscopy [J].

Fischer, P ;

Eimüller, T ;

Schütz, G ;

Köhler, M ;

Bayreuther, G ;

Denbeaux, G ;

Attwood, D .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (11) :7159-7161

[8]

GOODMAN JW, 2000, STAT OPTICS, P303

[9] ON THE DIFFRACTION THEORY OF OPTICAL IMAGES [J].

HOPKINS, HH .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1953, 217 (1130) :408-432

[10] Soft X-ray spectromicroscopy for in situ study of corrosion [J].

Kurtis, KE ;

Meyer-Ilse, W ;

Monteiro, PJM .

CORROSION SCIENCE, 2000, 42 (08) :1327-1336

← 1 2 →