Fabrication of Fully Transparent Indium-Doped ZnO Nanowire Field-Effect Transistors on ITO/Glass Substrates

被引:26
作者
Hsu, Cheng-Liang [1 ]
Tsai, Tsung-Ying [2 ,3 ]
机构
[1] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[2] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
关键词
THIN-FILM TRANSISTORS; LOW-TEMPERATURE; OXIDE; PHOTODETECTOR; OXIDATION;
D O I
10.1149/1.3517078
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Fully transparent indium (In)-doped ZnO nanowire field-effect transistors were prepared on a patterned SiO2/indium tin oxide (ITO)/SiO2/ITO/glass substrate by reactive evaporation. A crabwise In-doped ZnO nanowire is adopted in photodetectors, with a photocurrent to dark current contrast ratio of only 24.1. Crabwise In-doped ZnO nanowire field-effect transistors performed excellently with a mobility of 85.2 cm(2) V-1 s(-1). The ability to tune n-type conduction and the understanding of the transport properties of crabwise In-doped ZnO nanowires together represents an important step toward the development of ZnO nanowire-based electronic and photoelectronic devices. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3517078] All rights reserved.
引用
收藏
页码:K20 / K23
页数:4
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