A generalized Petri net modeling approach for the control of re-entrant flow semiconductor wafer fabrication

被引：29
作者：
Odrey, NG [1 ]
Green, JD [1 ]
Appello, A [1 ]
机构：
[1] Lehigh Univ, Dept Ind & Mfg Syst Engn, Bethlehem, PA 18015 USA
来源：
ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING | 2001年 / 17卷 / 1-2期
关键词：
Petri net modeling; re-entrant flow shops; scheduling; semiconductor manufacturing; work release policies;
D O I：
10.1016/S0736-5845(00)00031-4
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
Re-entrant flow manufacturing lines, such as occur in semiconductor wafer fabrication, are characterized by a product routing that consists of multiple visits to a workstation or group of workstations during the manufacturing process. In this paper, a modeling approach is based on the use of generalized Petri nets for a re-entrant flow manufacturing line is presented. Specifically, three Petri net models representing a re-entrant flow line with three work centers and six machines are modeled. How these models may be used to represent a variety of queuing disciplines and work release policies is discussed. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：5 / 11
页数：7
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