A generalized Petri net modeling approach for the control of re-entrant flow semiconductor wafer fabrication

被引：29

作者：

Odrey, NG ^{[1
]}

Green, JD ^{[1
]}

Appello, A ^{[1
]}

机构：

[1] Lehigh Univ, Dept Ind & Mfg Syst Engn, Bethlehem, PA 18015 USA

来源：

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING | 2001年 / 17卷 / 1-2期

关键词：

Petri net modeling; re-entrant flow shops; scheduling; semiconductor manufacturing; work release policies;

D O I：

10.1016/S0736-5845(00)00031-4

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Re-entrant flow manufacturing lines, such as occur in semiconductor wafer fabrication, are characterized by a product routing that consists of multiple visits to a workstation or group of workstations during the manufacturing process. In this paper, a modeling approach is based on the use of generalized Petri nets for a re-entrant flow manufacturing line is presented. Specifically, three Petri net models representing a re-entrant flow line with three work centers and six machines are modeled. How these models may be used to represent a variety of queuing disciplines and work release policies is discussed. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：5 / 11

页数：7

共 17 条

[1] PERFORMANCE ANALYSIS TECHNIQUES FOR IC MANUFACTURING LINES [J].

BURMAN, DY ;

GURROLAGAL, FJ ;

NOZARI, A ;

SATHAYE, S ;

SITARIK, JP .

AT&T TECHNICAL JOURNAL, 1986, 65 (04) :46-57

[2] Improving Flexible Semiconductor Manufacturing System performance by a coloured Petri net-based scheduling algorithm [J].

Cavalieri, S ;

Mirabella, O ;

Marroccia, S .

ETFA '97 - 1997 IEEE 6TH INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION PROCEEDINGS, 1997, :369-374

[3] EMPIRICAL-EVALUATION OF A QUEUING NETWORK MODEL FOR SEMICONDUCTOR WAFER FABRICATION [J].

CHEN, H ;

HARRISON, JM ;

MANDELBAUM, A ;

VANACKERE, A ;

WEIN, LM .

OPERATIONS RESEARCH, 1988, 36 (02) :202-215

[4] The QNET method for re-entrant queueing networks with priority disciplines [J].

Dai, JG ;

Yeh, DH ;

Zhou, C .

OPERATIONS RESEARCH, 1997, 45 (04) :610-623

[5]

Desrochers A. A., 1995, APPL PETRI NETS MANU

[6]

HARRIS JB, 1990, J EDUC COMPUT RES, V6, P1, DOI 10.2190/NRWX-1MD8-A107-R4W1

[7]

Kim J, 1997, IEEE SYS MAN CYBERN, P3227, DOI 10.1109/ICSMC.1997.633103

[8]

Kumar P. R., 1993, Queueing Systems Theory and Applications, V13, P87, DOI 10.1007/BF01158930

[9] EFFICIENT SCHEDULING POLICIES TO REDUCE MEAN AND VARIANCE OF CYCLE-TIME IN SEMICONDUCTOR MANUFACTURING PLANTS [J].

LU, SCH ;

RAMASWAMY, D ;

KUMAR, PR .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1994, 7 (03) :374-388

[10] DISTRIBUTED SCHEDULING BASED ON DUE DATES AND BUFFER PRIORITIES [J].

LU, SH ;

KUMAR, PR .

IEEE TRANSACTIONS ON AUTOMATIC CONTROL, 1991, 36 (12) :1406-1416

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