A 6.9-μm Pixel-Pitch Back-Illuminated Global Shutter CMOS Image Sensor With Pixel-Parallel 14-Bit Subthreshold ADC

被引：34

作者：

Sakakibara, Masaki ^{[1
]}

Ogawa, Koji ^{[1
]}

Sakai, Shin ^{[1
]}

Tochigi, Yasuhisa ^{[1
]}

Honda, Katsumi ^{[1
]}

Kikuchi, Hidekazu ^{[1
]}

Wada, Takuya ^{[1
]}

Kamikubo, Yasunobu ^{[1
]}

Miura, Tsukasa ^{[1
]}

Nakamizo, Masahiko ^{[1
]}

Jyo, Naoki ^{[2
]}

Hayashibara, Ryo ^{[2
]}

Miyata, Shinya ^{[1
]}

Yamamoto, Satoshi ^{[1
]}

Ota, Yoshiyuki ^{[1
]}

Takahashi, Hirotsugu ^{[1
]}

Taura, Tadayuki ^{[1
]}

Oike, Yusuke ^{[1
]}

Tatani, Keiji ^{[1
]}

Ezaki, Takayuki ^{[1
]}

Hirayama, Teruo ^{[1
]}

机构：

[1] Sony Semicond Solut, Atsugi, Kanagawa 2430014, Japan

[2] Sony Semicond Mfg, Kumamoto 8691102, Japan

来源：

IEEE JOURNAL OF SOLID-STATE CIRCUITS | 2018年 / 53卷 / 11期

关键词：

Analog-to-digital conversion (ADC); back illumination; CMOS image sensors (CIS); Cu-Cu connection; global shutter (GS); imagers; in-pixel ADC; stacking; subthreshold current;

D O I：

10.1109/JSSC.2018.2863947

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report on a back-illuminated, global shutter, CMOS image sensor (CIS) with a pixel-parallel, single-slope analog-to-digital converter (ADC). We adopted a digital bucket relay transfer with multistage flip-flop connection, a pixel unit Cu-Cu connection, and positive-feedback circuitry, to realize a 6.9-mu m pixel-pitch, 1.46-Mpixel pixel-parallel ADC. By operating the comparator with a bias current in the sub-threshold region of 7.74-111 nA, we succeeded in reducing the peak current during simultaneous ADC. In combination with an ADC standby operation, we succeeded in further reducing the pixel-parallel ADC power consumption. With these techniques, we realized a normalized figure of merit of 0.24 nJ.e-rms/step calculated by dividing the entire sensor power by the effective ADC resolution at a subthreshold current of 111 nA during 660 frames/s operation.

引用

页码：3017 / 3025

页数：9

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