Guided acoustic wave resonators using an acoustic Bragg mirror

被引：10

作者：

Kone, I. ^{[1
,2
,3
]}

Domingue, F. ^{[1
]}

Reinhardt, A. ^{[1
]}

Jacquinot, H. ^{[1
]}

Borel, M. ^{[1
]}

Gorisse, M. ^{[1
]}

Parat, G. ^{[1
]}

Casset, F. ^{[1
]}

Pellissier-Tanon, D. ^{[2
]}

Carpentier, J. F. ^{[2
]}

Buchaillot, L. ^{[3
]}

Dubus, B. ^{[3
]}

机构：

[1] CEA, Leti, Minatec, F-38054 Grenoble, France

[2] STMicroelectronics, FTM Crolles, F-38920 Crolles, France

[3] CNRS, UMR 8520, Dept ISEN, IEMN, F-59046 Lille, France

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 22期

关键词：

D O I：

10.1063/1.3440370

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lamb wave devices have recently gained an interest for providing narrow bandpass filters in wireless transmission systems. Their cointegration with film bulk acoustic wave resonators is a major advantage, enabling the possibility to provide simultaneously several radio frequency and intermediate-frequency filters in a single fabrication. Similarly, in this work, we report the fabrication of resonators using waves guided in a piezoelectric layer deposited atop a Bragg mirror. Such waves exhibit a behavior close to Lamb waves, thanks to the acoustic isolation provided by the mirror, while being cointegrated along with solidly mounted resonator structures. (C) 2010 American Institute of Physics. [doi:10.1063/1.3440370]

引用

页数：3

共 16 条

[1] Guided lamb waves in AlN free strips [J].

Benetti, M. ;

Cannata, D. ;

Di Pietrantonio, F. ;

Verona, E. .

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, :1673-1676

[2] ACOUSTIC SURFACE-WAVES IN PIEZOELECTRIC MATERIALS WITH PERIODIC METAL STRIPS ON SURFACE [J].

BLOTEKJAER, K ;

INGEBRIGTSEN, KA ;

SKEIE, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (12) :1139-1146

[3] Intermediate frequency lamb wave coupled resonator filters for RF receiver architectures [J].

Desvergne, M. ;

Defay, E. ;

Wolozan, D. ;

Aid, M. ;

Vincent, P. ;

Volatier, A. .

ESSDERC 2007: PROCEEDINGS OF THE 37TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, 2007, :358-+

[4]

Fattinger GG, 2005, ULTRASON, P1175

[5] Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators [J].

Ho, Gavin K. ;

Abdolvand, Reza ;

Sivapurapu, Abhishek ;

Humad, Shweta ;

Ayazi, Farrokh .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (02) :512-520

[6] Ultra-Miniature Coupled Resonator Filter with Single-Layer Acoustic Coupler [J].

Jamneala, Tiberiu ;

Koelle, Uli B. ;

Shirakawa, Alexandre ;

Gilbert, Stephen R. ;

Nikkel, Phil ;

Feng, Chris ;

Ruby, Rich .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2009, 56 (11) :2553-2558

[7] The OrnniSaw device concept (OmniSAW: Omnidirectional band gap for Surface Acoustic Wave) [J].

Khelif, Abdelkrim ;

Choujaa, Abdelkrim ;

Rauch, Jean-yves ;

Petreni, Valerie ;

Moubchir, Hannane ;

Benchabane, Sarah ;

Laude, Vincent .

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, :304-307

[8] Resonator using Guided waves in a piezoelectric layer above a Bragg mirror [J].

Kone, Issiaka ;

Dubus, Bertrand ;

Buchaillot, Lionel ;

Reinhardt, Alexandre ;

Casset, Fabrice ;

Aid, Marc ;

Carpentier, Jean Francois ;

Ancey, Pascal .

2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, :581-+

[9]

Marksteiner S, 2005, ULTRASON, P329

[10]

MILSOM RF, 2006, Patent No. 2006126168

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