Modeling of a helicon plasma source

被引：19
|
作者：
Bose, D [1 ]
Govindan, TR
Meyyappan, M
机构：
[1] ELORET Corp, Ames Res Ctr, Moffett Field, CA 94035 USA
[2] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2003年 / 31卷 / 04期
关键词：
helicon plasma; modeling; plasma discharges;
D O I：
10.1109/TPS.2003.815475
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A two-dimensional axisymmetric helicon plasma source with three-dimensional wave components is modeled. Plasma fluid equations are solved self-consistently with helicon wave equations. Electron inertia is taken into account to simulate the propagation of electrostatic wave components. The purpose of this paper is to describe the model in detail and present the results to verify wave propagation characteristics, power deposition mechanisms, especially bulk versus peripheral power absorption. We also study the effect of wave absorption characteristics on discharge plasma density and temperature profiles.
引用
收藏
页码：464 / 470
页数：7
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