The role of silicon interstitials in the formation of boron-oxygen defects in crystalline silicon

被引:9
作者
Macdonald, D [1 ]
Deenapanray, PNK
Cuevas, A
Diez, S
Glunz, SW
机构
[1] Australian Natl Univ, Dept Engn, Canberra, ACT 0200, Australia
[2] Australian Natl Univ, Ctr Sustainable Energy Syst, Canberra, ACT 0200, Australia
[3] Fraunhofer Inst Solar Energy Syst, D-79110 Freiburg, Germany
来源
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XI | 2005年 / 108-109卷
关键词
crystalline silicon; Czochralski; boron-oxygen defect; silicon interstitial;
D O I
10.4028/www.scientific.net/SSP.108-109.497
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Oxygen-rich crystalline silicon materials doped with boron are plagued by the presence of a well-known carrier-induced defect, usually triggered by illumination. Despite its importance in photovoltaic materials, the chemical make-up of the defect remains unclear. In this paper we examine whether the presence of excess silicon self-interstitials, introduced by ion-implantation, affects the formation of the defects under illumination. The results reveal that there is no discernible change in the carrier-induced defect concentration, although there is evidence for other defects caused by interactions between interstitials and oxygen. The insensitivity of the carrier-induced defect formation to the presence of silicon interstitials suggests that neither interstitials themselves, nor species heavily affected by their presence (such as interstitial boron), are likely to be involved in the defect structure, consistent with recent theoretical modelling.
引用
收藏
页码:497 / 501
页数:5
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