Ultra-Sensitive Optical Fiber Humidity Sensor via Au-Film-Assisted Polyvinyl Alcohol Micro-Cavity and Vernier Effect

被引：33

作者：

Hou, Liangtao ^{[1
]}

Li, Yan ^{[1
]}

Fu, Yiming ^{[1
]}

Yang, Jiuru ^{[2
]}

Xu, Weijiang ^{[1
]}

Song, Xiaokang ^{[3
]}

Li, Jinjian ^{[1
]}

Liu, Yi ^{[1
]}

Ran, Lingling ^{[3
]}

机构：

[1] Harbin Inst Technol, Dept Optoelect Sci, Weihai 264209, Peoples R China

[2] Heilongjiang Univ, Coll Heilongjiang, Key Lab Elect Engn, Harbin 150080, Peoples R China

[3] Heilongjiang Univ, Coll Elect Engn, Harbin 150080, Peoples R China

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2022年 / 71卷

关键词：

Au assistance; contrast; humidity sensor; micro-cavity; polyvinyl alcohol (PVA); FABRY-PEROT-INTERFEROMETER; RELATIVE-HUMIDITY; HUMAN BREATH; TEMPERATURE; COMPACT; PROBE; TIP; CAP;

D O I：

10.1109/TIM.2021.3139694

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To enhance humidity sensitivity, a parallel Fabry-Perot interferometer (FPI)-based Vernier scheme is theoretically and experimentally developed via the parallel and separated micro-cavities of polyvinyl alcohol (PVA) and hollow core fiber (HCF). Through Au-film assistance and fine attenuation adjustment, the matched light energy of micro-cavities is obtained and high-contrast envelope with similar to 11-fold improvement is demonstrated within the 200-nm range. Centering the similar to 77 mu m length Au-PVA micro-cavity, the comprehensive tests in terms of humidity are conducted. The experimental results show that, owing to the magnification of Vernier effect, ultra-sensitive humidity response of -9.14 nm/%RH is gained. And the crosstalk of temperature is constrained within -0.0843% RH/degrees C. In addition, 0.505 s dynamic time-response is verified through field tests of breathing. With the merits of stability, compact size, and ease of operation, our scheme is very practical and has potential in the applications of humidity-related biochemical sensing and medical health monitoring.

引用

页数：9

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