An investigation of rod-like defects in MOS 12

被引：0

作者：

Goodner, R ^{[1
]}

Wang, P ^{[1
]}

Lee, F ^{[1
]}

Ceton, R ^{[1
]}

Rios, J ^{[1
]}

Howard, S ^{[1
]}

机构：

[1] MOS 12 Die Mfg, Chandler, AZ USA

来源：

IN-LINE CHARACTERIZATION TECHNIQUES FOR PERFORMANCE AND YIELD ENHANCEMENT IN MICROELECTRONIC MANUFACTURING II | 1998年 / 3509卷

关键词：

laser marks; bitmapping; KLA; and process partitioning;

D O I：

10.1117/12.324417

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A unique defect type was detected by routine KLA inspection. The shape of the defect was rod like, about 1/2 micron in width with length varying from 1 to several microns. The defects were located in the notch area (see Fig. 1) with defect counts often exceeding one thousand per wafer. Through the analysis of bitmap/visual defect overlay, it was shown these rod-like defects are yield killers. This was confirmed by cumulative probe yield maps which showed lower yields for dice located near the notch. In this paper, the mechanism for the rod-like defect formation will be described in detail. The techniques used to investigate the mechanism, defect characteristics, and yield impact will be discussed. The implementation of the solution to eliminate the rod defects will also be discussed.

引用

页码：235 / 243

页数：9

共 50 条

[11] The rod-like macroscopic pile-ups of point defects in Ge
Belots'ka, AO
Khar'kova, GV
METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 1998, 20 (05): : 53 - 58
[12] ROD-LIKE DEFECTS IN OXYGEN-RICH CZOCHRALSKI GROWN SILICON
YAMAMOTO, N
PETROFF, PM
PATEL, JR
JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3475 - 3478
[13] STRESS-FIELDS AND DIFFRACTION CONTRAST OF ROD-LIKE DEFECTS IN SILICON
MALYSHEV, KL
GUTKIN, MY
ROMANOV, AE
SITNIKOVA, AA
SOROKIN, LM
FIZIKA TVERDOGO TELA, 1988, 30 (07): : 2040 - 2045
[14] {111} and {311} rod-like defects in silicon ion implanted silicon
Chou, CT
Cockayne, DJH
Zou, J
Kringhoj, P
Jagadish, C
1996 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES, PROCEEDINGS, 1996, : 305 - 308
[15] ORIGIN OF ROD-LIKE EUTECTIC
YUE, AS
JOURNAL OF THE INSTITUTE OF METALS, 1964, 92 (08): : 248 - &
[16] LUMINESCENCE FROM ROD-LIKE DEFECTS AND HYDROGEN-RELATED CENTERS IN SILICON
LIGHTOWLERS, EC
JEYANATHAN, L
SAFONOV, AN
HIGGS, V
DAVIES, G
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 24 (1-3): : 144 - 151
[17] Sonochemical synthesis and microstructure investigation of rod-like nanocrystalline rutile titania
Yang, K
Zhu, JM
Zhu, JJ
Huang, SS
Zhu, XH
Ma, GB
MATERIALS LETTERS, 2003, 57 (30) : 4639 - 4642
[18] Two-dimensional aggregation of rod-like particles:: A model investigation
Vincze, A
Demkó, L
Vörös, M
Zrínyi, M
Esmail, MN
Hórvölgyi, Z
JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (09): : 2404 - 2414
[19] Polymerization of rod-like micelles.
Kline, SR
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 216 : U652 - U653
[20] Moving interfaces in rod-like macromolecules
Raj, Ritwik
Purohit, Prashant K.
EPL, 2010, 91 (02)

← 1 2 3 4 5 →