Plasma-enhanced CVD for particle synthesis using circulating fluidized bed technology

被引：7

作者：

von Rohr, Philipp Rudolf ^{[1
]}

Borer, Beat ^{[1
]}

机构：

[1] ETH, Inst Proc Engn, CH-8092 Zurich, Switzerland

来源：

CHEMICAL VAPOR DEPOSITION | 2007年 / 13卷 / 09期

关键词：

circulating fluidized bed; coating; particle technology; PECVD; surface modification;

D O I：

10.1002/cvde.200706615

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Circulating fluidized beds (CFB) are widely used for gas-solid reactions. This presentation summarizes specific design and operational features for a CFB system with a non-thermal plasma. The results of coating a glass-like material using salt particles as a model substrate are shown. The potential of the new technology is broad, due to the fact that plasma-enhanced (PE)CVD can be used to combine and treat virtually any two different materials at low temperatures.

引用

页码：499 / 506

页数：8

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