A sensor based on the planar-polarization interferometer

被引:18
作者
Shirshov, YM
Svechnikov, SV
Kiyanovskii, AP
Ushenin, YV
Venger, EF
Samoylov, AV
Merker, R
机构
[1] Natl Acad Sci Ukraine, Inst Semicond Phys, UA-252650 Kiev, Ukraine
[2] Con QUIP GMBH, D-01309 Dresden, Germany
关键词
sensors; interferometers; planar polarization;
D O I
10.1016/S0924-4247(98)00080-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have successfully used a single-beam planar interferometer based on the silicon-silicon dioxide-silicon nitride-phosphosilicate glass multilayer structure. s- and p-polarizations of the same light beam are used as its individual arms. The high sensitivity of the device when serving as a refractometer and an immunosensor is demonstrated. The experimental results are shown to be in a good agreement with those calculated within the framework of a transverse synchronism. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:384 / 387
页数:4
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