The effect of Si content on structural, mechanical and optical behaviour of magnetron sputtered Al -Si -N nanocomposite thin films

被引:0
作者
Soni [1 ,2 ]
Sharma, S. K. [2 ]
Mishra, S. K. [1 ]
机构
[1] CSIR Natl Met Lab, Jamshedpur 831007, Bihar, India
[2] Indian Inst Technol ISM, Dhanbad 826004, Jharkhand, India
关键词
B-N; COATINGS; CORROSION; HARD; MICROSTRUCTURE; NANOCRYSTALLINE; WEAR; RESISTANCE; ENERGY; LOAD;
D O I
暂无
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
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页数:9
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