Experimental investigation on cumulative propagation of thin film buckling under cyclic load

被引：12

作者：

Wang ShiBin ^{[1
]}

Jia HaiKun ^{[1
]}

Li LinAn ^{[1
]}

Sun Heng ^{[1
]}

Cui DiQiang ^{[1
]}

Guo ZhenShan ^{[1
]}

Xue XiuLi ^{[1
]}

机构：

[1] Tianjin Univ, Dept Mech, Tianjin 300072, Peoples R China

来源：

SCIENCE CHINA-TECHNOLOGICAL SCIENCES | 2011年 / 54卷 / 06期

基金：

中国国家自然科学基金;

关键词：

thin film; cyclic load; buckling propagation; digital image processing; DRIVEN DELAMINATION; COMPLIANT SUBSTRATE;

D O I：

10.1007/s11431-011-4409-x

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

As instrument technology is needed for rapid determination of the smaller, thinner and lighter specimens, more stringent demands are related to thin films such as micro-electro-mechanical systems (MEMS), dielectric coatings and electronic packaging. Therefore, the requirement for testing platforms for rapidly determine the mechanical properties of thin films is increasing. Buckling of a film/substrate system could offer a variety of applications, ranging from stretchable electronics to micro-nanoscale metrology. In this paper, a fatigue-loading device has been designed to make the cyclic loading available for investigating the cumulative propagation of thin film buckling. The straight side buckling of thin compressed titanium film with the thickness of 50 nm deposited on organic glass substrates is investigated by using an optical microscope. The cumulative buckling propagation under the cyclic loading of a sequence of peak compression with the frequency 1 Hz is recorded by CCD camera. The buckling extension lengths are calculated by digital image measurement technology.

引用

页码：1371 / 1375

页数：5

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