Monte Carlo Simulation Study of Hole Mobility in Germanium MOS Inversion Layers

被引:0
|
作者
Riddet, C. [1 ]
Watling, J. R. [1 ]
Chan, K. H. [1 ]
Asenov, A. [1 ]
De Jaeger, Brice [2 ]
Mitard, Jerome [2 ]
Meuris, Marc [2 ]
机构
[1] Univ Glasgow, Device Modelling Grp, Sch Engn, Glasgow G12 8LT, Lanark, Scotland
[2] IMEC, B-3001 Heverlee, Belgium
基金
英国工程与自然科学研究理事会;
关键词
Monte Carlo; germanium; pMOSFET; surface roughness scattering; full band; high-kappa; SURFACE-ROUGHNESS SCATTERING; ELECTRON-TRANSPORT; SILICON; MODEL; TEMPERATURE; VARIABILITY; IMPACT; STATE;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper transport in the inversion layer of a Ge channel pMOS structure is studied using a full 6-band k.p Monte Carlo simulator. In addition to the usual bulk-scattering mechanisms, which are calibrated and validated against the available experimental data, effects of the gate stack are included via SO phonons and surface roughness scattering. Through careful calibration and consideration of these mechanisms, good qualitative and quantitative agreement is achieved with experimental data.
引用
收藏
页码:239 / 242
页数:4
相关论文
共 50 条
  • [1] A Monte Carlo study on electron mobility in quantized cubic silicon carbide inversion layers
    Gamiz, F
    Roldan, JB
    LopezVillanueva, JA
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (10) : 6857 - 6865
  • [2] Monte Carlo study on electron mobility in quantized cubic silicon carbide inversion layers
    Gamiz, F.
    Roldan, J.B.
    Lopez-Villanueva, J.A.
    Journal of Applied Physics, 1997, 81 (10):
  • [3] k&middotp and Monte Carlo studies of hole mobility in strained-Si pMOS inversion layers
    Institute of Microelectronics, Tsinghua University, Beijing 100084, China
    Pan Tao Ti Hsueh Pao, 2006, 12 (2144-2149):
  • [4] HOLE MOBILITY IN INVERSION-LAYERS OF MOS STRUCTURES WITH SUPERTHIN GATE DIELECTRIC
    GUZEV, AA
    GURTOV, VA
    RZHANOV, AV
    FRANTSUZOV, AA
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 56 (01): : 61 - 73
  • [5] Study of interface roughness dependence of electron mobility in Si inversion layers using the Monte Carlo method
    Yamakawa, S
    Ueno, H
    Taniguchi, K
    Hamaguchi, C
    Miyatsuji, K
    Masaki, K
    Ravaioli, U
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) : 911 - 916
  • [6] Carrier effective mobilities in germanium MOSFET inversion layer investigated by Monte Carlo simulation
    Xia, XL
    Du, G
    Liu, XY
    Kang, JF
    Han, RQ
    SOLID-STATE ELECTRONICS, 2005, 49 (12) : 1942 - 1946
  • [7] Study of positron mobility in GaAs by the Monte Carlo simulation
    Yu, Weizhong
    Yang, Pengyuan
    Yang, Jinhui
    Li, Xingzhong
    Zhoucheng/Bearing, (02): : 65 - 67
  • [8] Monte Carlo study on interface roughness dependence of electron mobility in 6H-SiC inversion layers
    Shang, Y.C.
    Zhang, Y.M.
    Zhang, Y.M.
    Wuli Xuebao/Acta Physica Sinica, 2001, 50 (07):
  • [9] Monte Carlo study on interface roughness dependence of electron mobility in 6H-SiC inversion layers
    Shang, YC
    Zhang, YM
    Zhang, YM
    ACTA PHYSICA SINICA, 2001, 50 (07) : 1350 - 1354
  • [10] Monte Carlo study of electron transport in strained silicon inversion layers
    E. Ungersboeck
    H. Kosina
    Journal of Computational Electronics, 2006, 5 : 79 - 83