Photolithography Fabricated Spacer Arrays Offering Mechanical Strengthening and Oil Motion Control in Electrowetting Displays

被引:11
作者
Dou, Yingying [1 ,2 ,3 ]
Chen, Lin [1 ,2 ,3 ]
Li, Hui [4 ]
Tang, Biao [1 ,2 ,3 ]
Henzen, Alex [1 ,2 ,3 ]
Zhou, Guofu [1 ,2 ,3 ,5 ,6 ]
机构
[1] South China Normal Univ, South China Acad Adv Optoelect, Guangdong Prov Key Lab Opt Informat Mat & Technol, Guangzhou 510006, Peoples R China
[2] South China Normal Univ, South China Acad Adv Optoelect, Inst Elect Paper Displays, Guangzhou 510006, Peoples R China
[3] South China Normal Univ, Natl Ctr Int Res Green Optoelect, Guangzhou 510006, Peoples R China
[4] Shenzhen Univ, Coll Mechatron & Control Engn, Nanhai Ave 3688, Shenzhen 518060, Peoples R China
[5] Shenzhen Guohua Optoelect Tech Co Ltd, Shenzhen 518110, Peoples R China
[6] Acad Shenzhen Guohua Optoelect, Shenzhen 518110, Peoples R China
基金
国家重点研发计划;
关键词
electrowetting display; oil motion; spacer arrays; mechanical strength; optoelectronic performance; HIGH-ASPECT-RATIO; PHOTORESIST; SU-8;
D O I
10.3390/s20020494
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Introducing spacers into pixelated electrowetting displays (EWDs) normally gives mechanical strengthening, while bringing undesired disturbance of water/oil interfacial dynamics. Hence, spacer array is a key pixel structure needs careful consideration in the design and fabrication of electrowetting displays. Here, we propose a spacer array, which is designed standing on the junction of adjacent pixel walls, fabricated by photolithography. The spacer array provides mechanical strength enhancement and reliable oil motion controllability. By optimizing the spacer distribution density, the EWD device may achieve 28% increase in open ratio (white area fraction) and withstand 60 N/mm(2) pressure. This design of spacer array reasonably solves the contradiction between mechanical strength enhancement and optoelectronic performance in EWDs, providing potential applications in oil-water two-phase microfluidic devices.
引用
收藏
页数:11
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