Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

被引：0
作者：
He, Guotian [1 ,3 ]
Wang, Xiangzhao [1 ]
Zeng, Aijun [2 ]
Tang, Feng [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
[2] Shanghai Hengyi Opt & Fine Mech Co Ltd, Shanghai 201800, Peoples R China
[3] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2007年 / 5卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 x 60 measurement points of the surface profile, the measuring time is 10 ins. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.
引用
收藏
页码：164 / 167
页数：4
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