Analysis of thermodynamic properties and phase equilibria in the Si-P system

被引：5

作者：

Arutyunyan, N. A. ^{[1
]}

Zaitsev, A. I. ^{[2
]}

Shaposhnikov, N. G. ^{[2
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Chem, Moscow 119991, Russia

[2] Bardin Cent Res Inst Iron & Steel Ind, Moscow 105005, Russia

来源：

RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY A | 2011年 / 85卷 / 06期

基金：

俄罗斯基础研究基金会;

关键词：

phase equilibria; liquid and solid solutions of phosphorus; thermodynamic properties; silicon; SILICON; PHOSPHORUS; SOLUBILITY; DIFFUSION; DIAGRAMS; ELEMENTS; DOPANT; LAYERS;

D O I：

10.1134/S0036024411060057

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A self-consistent analysis of the available data on thermodynamic properties and phase equilibria in the Si-P system is performed. Thermodynamic properties of solid and liquid solutions of phosphorus in silicon are approximated on the basis of the concepts of dilute and ideal associated solutions. The thermodynamic properties and phase boundaries in the range of compositions 0 a parts per thousand currency sign x(P) a parts per thousand currency sign 0.5 are adequately described.

引用

页码：911 / 915

页数：5

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