Molecular dynamics simulations of film-substrate interface mixing in the energetic deposition of fcc metals

被引:39
作者
Sprague, JA [1 ]
Gilmore, CM [1 ]
机构
[1] GEORGE WASHINGTON UNIV,WASHINGTON,DC 20016
基金
美国国家科学基金会;
关键词
coatings; deposition process; ion bombardment; metals;
D O I
10.1016/0040-6090(95)06951-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Embedded-atom-method molecular dynamic simulations have been performed to examine the interface mixing produced by deposition of fee metals on fee metal substrates. Atom arrival energies of 0.1, 10, 20, and 10 eV have been studied. The interface mixing initiated by atom impacts on the substrate surface was found to increase significantly with increasingly negative heats of solution of film atoms in the substrate lattice. As expected. both the total amount of interface mixing and the depth over which it occurred increased with increasing atom deposition energy. Comparison of the interface mixing results for two different temperature-control algorithms led to the conclusion that the interface mixing was very sensitive to short-lived localized substrate lattice excitations in the vicinity of atom impacts. This concept of interface mixing has some similarities to the concept of a thermal spike in bulk ion mixing, but does not involve any localized melting of the lattice. For a simulation of 0.1 eV Ni deposition on a Au substrate, a thermally-activated interface mixing process with a low activation energy was observed, driven by the difference between the surface energies of Ni and Au.
引用
收藏
页码:244 / 254
页数:11
相关论文
共 36 条
[1]   EFFECTS OF HIGH-FLUX LOW-ENERGY (20-100 EV) ION IRRADIATION DURING DEPOSITION ON THE MICROSTRUCTURE AND PREFERRED ORIENTATION OF TI0.5AL0.5N ALLOYS GROWN BY ULTRA-HIGH-VACUUM REACTIVE MAGNETRON SPUTTERING [J].
ADIBI, F ;
PETROV, I ;
GREENE, JE ;
HULTMAN, L ;
SUNDGREN, JE .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (12) :8580-8589
[2]   TRIBOLOGICAL BEHAVIOR OF TIN FILMS DEPOSITED BY HIGH-ENERGY ION-BEAM-ASSISTED DEPOSITION [J].
BOLSTER, RN ;
SINGER, IL ;
KANT, RA ;
SARTWELL, BD ;
GOSSETT, CR .
SURFACE & COATINGS TECHNOLOGY, 1988, 36 (3-4) :781-790
[3]   PARTITIONING OF ION-INDUCED SURFACE AND BULK DISPLACEMENTS [J].
BRICE, DK ;
TSAO, JY ;
PICRAUX, ST .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 44 (01) :68-78
[4]   SURFACE-STRUCTURE AND METAL EPITAXY - STM STUDIES OF ULTRATHIN METAL-FILMS ON AU(111) AND CU(100) [J].
CHAMBLISS, DD ;
JOHNSON, KE ;
WILSON, RJ ;
CHIANG, S .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1993, 121 (1-3) :1-9
[5]   DEPOSITION OF (100) AU, AG, PD, PT, AND FE ON (100) SI USING DIFFERENT METAL SEED LAYERS [J].
CHANG, CA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (01) :98-101
[6]   INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J].
CHENG, YT ;
VANROSSUM, M ;
NICOLET, MA ;
JOHNSON, WL .
APPLIED PHYSICS LETTERS, 1984, 45 (02) :185-187
[7]   MODEL OF METALLIC COHESION - THE EMBEDDED-ATOM METHOD [J].
DAW, MS .
PHYSICAL REVIEW B, 1989, 39 (11) :7441-7452
[8]   EMBEDDED-ATOM METHOD - DERIVATION AND APPLICATION TO IMPURITIES, SURFACES, AND OTHER DEFECTS IN METALS [J].
DAW, MS ;
BASKES, MI .
PHYSICAL REVIEW B, 1984, 29 (12) :6443-6453
[9]  
DAW MS, UNPUB DYNAMIC CODE 5
[10]   NONADIABATIC BONDING INTERACTIONS IN SUB-KEV ION SOLID PROCESSES [J].
DODSON, BW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 44 (03) :273-277