Pressure control system for vacuum MEMS

被引：6

作者：

Grzebyk, Tomasz ^{[1
]}

Turczyk, Krzysztof ^{[1
]}

Szyszka, Piotr ^{[1
]}

Gorecka-Drzazga, Anna ^{[1
]}

Dziuban, Jan ^{[1
]}

机构：

[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, Dept Microsyst, 11-17 Janiszewskiego St, PL-50372 Wroclaw, Poland

来源：

VACUUM | 2020年 / 178卷

关键词：

MASS-SPECTROMETER; GAS-FLOW; MINIATURE;

D O I：

10.1016/j.vacuum.2020.109452

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a pressure control system designed for MEMS (Micro-Electro-Mechanical System) devices working in vacuum conditions, especially for a currently developed miniature mass spectrometer. It is based on an idea to set the vacuum level inside a MEMS in a dynamic way. This is achieved by connecting it to the external atmosphere through a microchannel ensuring extremely small gas leakage and by continuous pumping its internal volume by an integrated MEMS micropump. The experimental results proved that it is possible to maintain the pressure in the range required for the operation of a mass spectrometer, from 10(-5) mbar to 10(-2) mbar.

引用

页数：6

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