High-speed and Large-range scanning control of a piezoelectric stack actuated platform

被引：1

作者：

Cheng, Li ^{[1
]}

Zhang, Cheng-jin ^{[1
]}

Zhang, Guilin ^{[1
]}

机构：

[1] Shandong Univ, Sch Control Sci & Engn, Jinan 250061, Shandong Provin, Peoples R China

来源：

2010 8TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA) | 2010年

关键词：

Piezoelectric platform; MPI model; damping controller; feedforward; IDENTIFICATION; COMPENSATION;

D O I：

10.1109/WCICA.2010.5554272

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, high-speed, large-range scanning control of piezoelectric stack actuated platform is discussed. In order to obtain preferable tracking control, an inverse Modified Prandtl-Ishlinskii model (MPI) is first established to reduce hysteresis nonlinearity. Then, a second order linear model is identified and a polynomial-based damping controller is designed to damp the first resonant frequency of system. Finally, the design strategy is applied to the motion control of a nanopositioning platform, and simulate results are presented to verify the usefulness of this method.

引用

页码：5523 / 5527

页数：5

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