Preparation of HfO2 Thin Film Through Self-Assembled Monolayers on Si Substrate

被引：0

作者：

Zheng Yu-Qin ^{[1
]}

Tan Guo-Qiang ^{[1
]}

Miao Hong-Yan ^{[1
]}

He Zhong-Liang ^{[1
]}

Xia Ao ^{[1
]}

Bo Hai-Yang ^{[1
]}

机构：

[1] Shaanxi Univ Sci & Technol, Key Lab Auxiliary Chem & Technol Chem Ind, Minist Educ, Xian 710021, Shaanxi, Peoples R China

来源：

CHINESE CERAMICS COMMUNICATIONS | 2010年 / 105-106卷

关键词：

Self-assembled monolayers; HfO(2) thin film; Silicon substrate; GROWTH;

D O I：

10.4028/www.scientific.net/AMR.105-106.255

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

HfO(2) thin film was successfully prepared on the silicon substrate by the Liquid Phase Deposition (LPD) and functionalized organic self-assembled monolayers (SAMs) method. Measurement of contact angle showed that SAMs surface characteristics changed from hydrophobic to hydrophilic after UV irradiation. Photographs of Metallographic Microscope showed that octadecyl trichlorosilane-self-assembled monolayers (OTS-SAMs) had an active effect on the deposition of HfO(2) thin film. XRD, SEM and AFM images indicated that the HfO(2) thin film with cubic crystal structure was smooth, uniform and dense. Its grain size was between 40-100 nm and the height of thin film varies between 20 and 100 nm.

引用

页码：255 / 258

页数：4

共 50 条

[41] Photoactive self-assembled monolayers for optically switchable organic thin-film transistors
Salinas, Michael
Halik, Marcus
APPLIED PHYSICS LETTERS, 2013, 102 (20)
[42] n-type organic thin-film transistors with self-assembled monolayers
Kim, SH
Lee, JH
Yang, YS
Lee, JK
Zyung, T
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S551 - S554
[43] Nanometer-scale organic thin film transistors from self-assembled monolayers
Vuillaume, D
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2002, 2 (3-4) : 267 - 279
[44] Recent progress in interface engineering of organic thin film transistors with self-assembled monolayers
Liu, Danqing
Miao, Qian
MATERIALS CHEMISTRY FRONTIERS, 2018, 2 (01) : 11 - 21
[45] Characteristics improvement of flexible organic thin film transistors by self-assembled monolayers treatment
Wen, Jiing-Fa
Shen, Yu-Yuan
Wang, Yi-Kai
Kao, Chia-Chun
Ho, Jia-Chong
Chou, Hseih-Tao
IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007, 2007, : 319 - +
[46] BaTiO3 Functional Ceramics Thin Film Prepared by Self-Assembled Monolayers
Tan Guoqiang
Cheng Zhang
Miao Hongyan
Ren Huijun
Xia Ao
CHINESE CERAMICS COMMUNICATIONS, 2010, 105-106 : 266 - 269
[47] Preparation of self-assembled monolayers inscCO2 and their application to fabrication and Patterning of polymer thin films
Kim, Ji Young
Park, Young Hwan
Kim, Jong Su
Lim, Kwon Taek
Jeong, Yeon Tae
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY, 2007, 13 (06) : 1023 - 1028
[48] Stable Flexible Organic Thin Film Transistor with Self-Assembled Monolayers Surface Treatment
Liao, C. L.
Chou, C. C.
Liu, C. W.
Chiang, K. Y.
Leu, C. Y.
Ding, J. M.
Hu, J. P.
IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 2231 - 2233
[49] Performances of sexithiophene based thin-film transistor using self-assembled monolayers
Collet, J
Tharaud, O
Legrand, C
Chapoton, A
Vuillaume, D
ELECTRICAL, OPTICAL, AND MAGNETIC PROPERTIES OF ORGANIC SOLID-STATE MATERIALS IV, 1998, 488 : 407 - 412
[50] Electrochemical assessment of electrochemical oxidation stability of self-assembled monolayers on gold and preparation of binary self-assembled monolayers on gold
Chen, Yu
Yang, Chen
Wang, Feng-Bin
ELECTROCHIMICA ACTA, 2010, 55 (12) : 3951 - 3956

← 1 2 3 4 5 →