[1] Korea Inst Machinery & Mat KIMM, Dept Plasma Engn, Daejeon 34103, South Korea
[2] Chung Ang Univ, Sch Integrat Engn, Seoul 06973, South Korea
[3] Sungkyunkwan Univ SKKU, SKKU Adv Inst Nanotechnol, Suwon 16419, Gyeonggi Do, South Korea
[4] Pohang Univ Sci & Technol POSTECH, Grad Inst Ferrous & Energy Mat Technol, Pohang 37673, South Korea
[5] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon 34134, South Korea
[6] Sungkyunkwan Univ, Sch Mech Engn, Suwon 16419, Gyeonggi Do, South Korea