共 50 条
[41]
Proposed adaptive optics control loop for a continuous face sheet, MEMS based deformable membrane mirror
[J].
ADVANCED WAVEFRONT CONTROL: METHODS, DEVICES, AND APPLICATIONS IV,
2006, 6306
[43]
Simulation and interferometer results of MEMS deformable mirrors
[J].
MEMS ADAPTIVE OPTICS II,
2008, 6888
[44]
Reliability of MEMS deformable mirror technology used in adaptive optics imaging systems
[J].
MEMS ADAPTIVE OPTICS IV,
2010, 7595
[47]
Membrane mirrors for vision science adaptive optics
[J].
MOEMS AND MINIATURIZED SYSTEMS II,
2001, 4561
:147-162
[48]
Electrostatically actuated membrane mirrors for adaptive optics
[J].
MOEMS AND MINATURIZED SYSTEMS III,
2003, 4983
:250-258
[49]
Extreme adaptive optics testbed: Performance and characterization of a 1024-MEMS deformable mirror
[J].
MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS III,
2006, 6113
[50]
Finite element analysis of low cost membrane deformable mirrors for high order adaptive optics
[J].
ADVANCED TELESCOPE DESIGN, FABRICATION, AND CONTROL,
1999, 3785
:160-167