POLAR AXIS ORIENTATION AND ELECTRICAL PROPERTIES OF ALKOXY-DERIVED ONE MICRO-METER-THICK FERRO-/PIEZOELECTRIC FILMS

被引：0

作者：

Kato, Kazumi ^{[1
,2
]}

Kayukawa, Shingo ^{[2
]}

Suzuki, Kazuyuki ^{[1
]}

Masuda, Yoshitake ^{[1
]}

Kimura, Tatsuo ^{[1
]}

Nishizawa, Kaori ^{[1
]}

Miki, Takeshi ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, 2266-98 Anagahora, Nagoya, Aichi 4638560, Japan

[2] Nagoya Inst Technol, Showa Ku, Nagoya, Aichi 4668555, Japan

来源：

ADVANCES IN ELECTRONIC CERAMICS | 2008年 / 28卷 / 08期

关键词：

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Polar-axis oriented CaBi4Ti4O15 (CBTi144) films were fabricated on Pt foils using a complex metal alkoxide solution. Ambient during heat treatments such as pre-baking and crystallization affected the nucleation behaviors of the alkoxy-derived films. It was found that the pre-baking ambient affected the microstructure, and the crystallization ambient impacted the crystal perfection and the ferroelectric properties. The 500 nm-thick film that was pre-baked in air and then crystallized in oxygen flow consisted of columnar grains with rather rough surface and showed good ferroelectric properties. Closely-packed dense structure with relatively smooth surface was obtained by both pre-baking and crystallization in oxygen flow. The 1 mu m-thick CBTi144 films exhibited low leakage current density of 10(-7) A/cm(2) and high piezoelectric constant, d(33) of 260 pm/V.

引用

页码：33 / +

页数：3

共 20 条

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Journal of Advanced Ceramics, 2020, (06) : 693 - 702
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (9B): : 6885 - 6890
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