Micro-force measurements: a new instrument at METAS

被引：9

作者：

Marti, K. ^{[1
]}

Wuethrich, C. ^{[1
]}

Aeschbacher, M. ^{[1
]}

Russi, S. ^{[1
]}

Brand, U. ^{[2
]}

Li, Z. ^{[2
]}

机构：

[1] Fed Inst Metrol METAS, Lindenweg 50, CH-3003 Bern, Switzerland

[2] Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2020年 / 31卷 / 07期

关键词：

microforce sensor; SI traceable force calibration; electromagnetic force compensation; METROLOGY;

D O I：

10.1088/1361-6501/ab79c7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We designed and developed a new instrument for calibrating micro-force sensors. The calibration is traceable to the SI unit of mass and is realized from 1 mu N-60 mN by means of electromagnetic force compensation of a balance. The expanded measurement uncertainty of our instrument comprises two contributions, an absolute contribution of 0.13 mu N and a relative contribution of 2700 ppm. We verified our instrument in a bilateral comparison between METAS and PTB's instruments for forces from 40 mu N up to 20 mN. The degrees of equivalence found by the two institutes are in excellent agreement.

引用

页数：13

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