The Meter of Microdisplacements Based on Piezoelectric Lateral Electric Field Excited Resonator

At present the great interest of researchers is stimulated by piezoelectric lateral electric field excited resonators the electric field of which penetrates in contacting vacuum. The characteristics of resonator were studied at moving off its free side the glass plate with a strongly conductive film. It has been shown that parallel resonance frequency unambiguously ties with the gap width between resonator and conducting film. The series resonance frequency does not depend on the gap width but depends on the temperature. The resonators were made on plates of lithium niobate and PZT ceramics. The investigations showed the possibility of the development of the meter of microdisplacements with the temperature compensation on this basis. The ranges of measured displacements are equal 0-2 mm and 0-0.3 mm for resonators on lithium niobate and PZT ceramics, respectively. These devices may be used for continuous monitoring the deformation and crack opening displacement of various constructions.