Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

被引：0

作者：

Al-Ahmad, M. ^{[1
,2
]}

Loyez, C. ^{[2
]}

Rolland, N. ^{[2
]}

Plana, R. ^{[1
]}

Rolland, P. -A. ^{[2
]}

机构：

[1] CNRS, LAAS, 7 Ave Colonel Roche, F-31077 Toulouse 4, France

[2] CNRS, IEMN IRCICA, UMR, F-59652 Villeneuve Dascq, France

来源：

2007 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4 | 2007年

关键词：

negative resistance circuits; microelectromechanical devices; microstrip resonators; oscillator; piezoelectric material; tuning; tunable devices and circuits; varactors; voltage controlled oscillator;

D O I：

10.1109/EUMC.2007.4405140

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S-eff, increases continuously from 5 mu m to 10.5 mu m. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz; to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).

引用

页码：118 / +

页数：2