COMSOL Simulation of a 2.45 GHz Electron Cyclotron Resonance Argon Plasma

被引：5

作者：

Salahshoor, Mostafa ^{[1
]}

Aslaninejad, Morteza ^{[1
]}

机构：

[1] Inst Res Fundamental Sci IPM, Sch Particles & Accelerators, POB 19395-5531, Tehran, Iran

来源：

PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE ON ION SOURCES | 2018年 / 2011卷

关键词：

ECR PLASMA;

D O I：

10.1063/1.5053298

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Argon plasma behavior in a 2.45 GHz electron cyclotron resonance (ECR) plasma source is studied by means of the finite element software COMSOL. The ECR plasma is simulated in two stages. First, the static magnetic field, produced by three solenoids and a set of Halbach permanent magnets, is simulated in a stationary study. This field is then used to simulate the properties of an on-resonance microwave plasma. Our first results including magnetic field distribution, electron density, Argon ion density and microwave power absorption are presented.

引用

页数：3

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