Effect of the deposition parameters on the properties of the two-layer surface coatings obtained using magnetron sputtering

被引：3

作者：

Dobrzanski, LA

Kwasny, W

Shishkov, R

Madejski, J

机构：

[1] Silesian Tech Univ, Inst Engn Mat & Biomat, Div Mat Proc Technol & Comp Tech Mat Sci, PL-44100 Gliwice, Poland

[2] Univ Rousse, Fac Mat Sci, Rousse, Bulgaria

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2001年 / 113卷 / 1-3期

关键词：

PVD coatings; adhesion; texture coefficient; diffusion;

D O I：

10.1016/S0924-0136(01)00722-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the effect of the deposition parameters on the properties of the Ti + TiN, Ti + Ti(CxNx-1), and Ti + TiC two-layer surface coatings obtained using magnetron sputtering in a vacuum furnace with a controlled temperature on a sintered ASP 30 high-speed matrix. Results of the investigated coatings' tests are presented, depending on the working atmosphere, distance from the magnetron shield, and vacuum furnace temperature. Their effect on the structural and mechanical properties of the coatings has been evaluated. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：493 / 501

页数：9

共 9 条

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