Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing

被引：58

作者：

Reichelt, S ^{[1
]}

Zappe, H ^{[1
]}

机构：

[1] Univ Freiburg, Lab Microopt, Inst Microsyst Technol, D-79110 Freiburg, Germany

来源：

APPLIED OPTICS | 2005年 / 44卷 / 27期

关键词：

D O I：

10.1364/AO.44.005786

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new interferometer design for microlens testing is presented. The phase-shifting system combines the advantages of a Twyman-Green and a Mach-Zehnder interferometer and permits full characterization of the aberrations of microlenses as well as radius of curvature and focal length measurements. The Twyman-Green system is applied to surface testing in reflection (single reflection), whereas the Mach-Zehnder system is used for lens testing in transmission (single pass). Both measurements are performed without removal of the test part, allowing for combination of the results without confusion of the actual lens and without an azimuthal orientation error. The interterometer setup is explained, the test procedure is described, and experimental results are given. (c) 2005 Optical Society of America.

引用

页码：5786 / 5792

页数：7

共 20 条

[1]

BURNING JH, 1970, APPL OPTICS, V9, P2180

[2] TESTING SPHERICAL SURFACES - A FAST, QUASI-ABSOLUTE TECHNIQUE [J].

CREATH, K ;

WYANT, JC .

APPLIED OPTICS, 1992, 31 (22) :4350-4354

[3]

Daly D., 2001, Microlens Arrays

[4]

DALY DJ, 1994, P SOC PHOTO-OPT INS, V2340, P258, DOI 10.1117/12.195919

[5] VISUALIZATION OF SURFACE FIGURE BY THE USE OF ZERNIKE POLYNOMIALS [J].

EVANS, CJ ;

PARKS, RE ;

SULLIVAN, PJ ;

TAYLOR, JS .

APPLIED OPTICS, 1995, 34 (34) :7815-7819

[6]

FALCO L, 2004, 10 MICR C JEN GERM 1

[7]

HUTLEY MC, 1990, PROC SPIE, V1319, P491, DOI 10.1117/12.34817

[8]

HUTLEY MC, 1991, IOP SHORT M SERIES, V30, P67

[9]

JENSEN AE, 1973, J OPT SOC AM, V63, P1313

[10]

KRUG W, 1951, ANN PHYS, V6, P329

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