Structure of the InAlAs/InP interface by atomically resolved energy dispersive spectroscopy

被引：25

作者：

Klenov, Dmitri O. ^{[2
]}

Zide, Joshua M. O. ^{[1
,3
]}

机构：

[1] Univ Delaware, Newark, DE 19716 USA

[2] FEI Co, NL-5600 KA Eindhoven, Netherlands

[3] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93116 USA

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 14期

基金：

美国国家科学基金会;

关键词：

aluminium compounds; III-V semiconductors; indium compounds; interface structure; scanning-transmission electron microscopy; semiconductor epitaxial layers; X-ray chemical analysis;

D O I：

10.1063/1.3645632

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The structure of epitaxially grown InAlAs/InP interfaces was studied using atomically resolved x-ray energy dispersive spectroscopy in scanning transmission electron microscopy. As and P sublattices show sharp termination on the interface. The In sublattice is continuous across the interface. The study has shown the depletion of the Al concentration at the interface; at the last atomic columns of the InAlAs, In occupancy is close to 100%, while Al occupancy is almost zero. A monolayer of InAs at the interface is consistent with substitution of As for P at the surface preceding growth. (C) 2011 American Institute of Physics. [doi:10.1063/1.3645632]

引用

页数：3

共 11 条

[1]

[Anonymous], 2009, J AM CHEM SOC, DOI DOI 10.1021/JA906434C

[2] OXIDE DESORPTION FROM INP UNDER STABILIZING PRESSURES OF P2 OR AS4 [J].

AVERBECK, R ;

RIECHERT, H ;

SCHLOTTERER, H ;

WEIMANN, G .

APPLIED PHYSICS LETTERS, 1991, 59 (14) :1732-1734

[3]

CHERNS D, 1973, Z NATURFORSCH A, VA 28, P565

[4] Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy [J].

D'Alfonso, A. J. ;

Freitag, B. ;

Klenov, D. ;

Allen, L. J. .

PHYSICAL REVIEW B, 2010, 81 (10)

[5] ENHANCED X-RAY EMISSION FROM EXTINCTION CONTOURS IN A SINGLE-CRYSTAL GOLD FILM [J].

DUNCUMB, P .

PHILOSOPHICAL MAGAZINE, 1962, 7 (84) :2101-&

[6] Contributions to the contrast in experimental high-angle annular dark-field images [J].

Klenov, Dmitri O. ;

Stemmer, Susanne .

ULTRAMICROSCOPY, 2006, 106 (10) :889-901

[7]

Klenov DO, 2005, APPL PHYS LETT, V86, DOI [10.1063/1.1947910, 10.1063/1.1857068]

[8]

KLENOV DO, MRS B UNPUB

[9] Electron Channeling: A Problem for X-Ray Microanalysis in Materials Science [J].

Meisenkothen, Frederick ;

Wheeler, Robert ;

Uchic, Michael D. ;

Kerns, Robert D. ;

Scheltens, Frank J. .

MICROSCOPY AND MICROANALYSIS, 2009, 15 (02) :83-92

[10]

Schlossmacher P., 2010, Micros. Today, V18, P14, DOI DOI 10.1017/S1551929510000404

← 1 2 →