Thin-film characterization by grazing incidence X-ray diffraction and multiple beam interference

被引：8

作者：

Chang, SL ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2001年 / 62卷 / 9-10期

关键词：

thin films; X-ray diffraction; crystal structure;

D O I：

10.1016/S0022-3697(01)00109-3

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An overview is given of the application of two-beam and multiple-beam approach to grazing incidence X-ray diffraction (GIXD) for single-crystal thin film characterization. Crystallographic orientation, lattice mismatch, order parameter, and phase of in-plane reflection for various thin film systems are determined by using conventional two-beam GM and resonance three-beam GIXD. The diffraction technique, analysis procedure, and theoretical consideration are also presented and discussed. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：1765 / 1775

页数：11

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