Ion temperature;
Plasma-sheath transition;
Electronegative plasmas;
POSITIVE-COLUMN;
TEMPERATURE;
D O I:
10.1007/s10894-011-9412-5
中图分类号:
TL [原子能技术];
O571 [原子核物理学];
学科分类号:
0827 ;
082701 ;
摘要:
Using a fluid model for three types of particles, the plasma-sheath formation criterion has been analyzed in collisional electronegative plasma, and the effects of the negative ion temperature and density are examined on the positive ion transition velocity. It is shown that in the collisional sheath, there will be an allowable interval for the positive ion velocity between two upper and lower limits as the plasma-sheath formation criterion; by increasing the mean temperature of the negative charge carriers, this velocity interval decreases. To confirm the correction of the allowable interval, the plasma sheath equations are numerically solved, and the negative ion temperature effect for example, is examined on the sheath formation.