Feasibility of polyethylene film as both supporting material for transfer and target substrate for flexible strain sensor of CVD graphene grown on Cu foil

被引:15
作者
Cai, Shuxian [1 ,3 ]
Liu, Xingfang [2 ]
Huang, Jianan [3 ]
Liu, Zhonghua [1 ]
机构
[1] Hunan Agr Univ, Natl Res Ctr Engn Technol Utilizat Bot Funct Ingr, Changsha 410128, Hunan, Peoples R China
[2] Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100083, Peoples R China
[3] Hunan Agr Univ, Key Lab, Minist Educ TEA Sci, Changsha 410128, Hunan, Peoples R China
基金
中国国家自然科学基金;
关键词
VAPOR-DEPOSITED GRAPHENE; PRESSURE SENSORS; COPPER FOILS; HIGH-QUALITY; TRANSPARENT; TRANSISTORS; OXIDE;
D O I
10.1039/c7ra09492b
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Chemical vapour deposited graphene on Cu foil should be transferred to target dielectric substrate before being used in various applications. This route often involves preparation of a supporting material on graphene before the transfer process and removal of the material after graphene is transferred to a foreign substrate. Herein, we demonstrate a simple process combining graphene transfer and subsequent graphene-based sensor preparation in one route. By applying a thin flexible polyethylene (PE) film onto graphene and subsequently chemical etching Cu foil, this process enables the high-quality transfer of graphene on PE film. A flexible strain sensor prepared from the as-transferred graphene/PE film shows good detection sensitivity. Therefore, this process could greatly reduce the cost of transfer and device fabrication for mass production.
引用
收藏
页码:48333 / 48340
页数:8
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