Microstructural study of boron doped diamond films by X-ray diffraction profiles analysis

被引：14

作者：

Brunet, F ^{[1
]}

Germi, P ^{[1
]}

Pernet, M ^{[1
]}

机构：

[1] Universite Joseph Fourier, CNRS, Lab Cristallog, F-38042 Grenoble, France

来源：

THIN SOLID FILMS | 1998年 / 322卷 / 1-2期

关键词：

boron doped diamond films; X-ray diffraction pattern; line profile;

D O I：

10.1016/S0040-6090(97)00925-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A single-line analysis of X-ray diffraction patterns was improved to study the microstructure of boron doped diamond films. This analysis requires that an analytic function be ascribed to each reflection. Such a function must model the observed data as precisely as possible and should allow readily a separation of the breadth of convoluted functions. The line profile due to size effect is assumed to be a Cauchy function and the shape of the strain profile is taken as a Gauss function. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：143 / 147

页数：5