Microstructural study of boron doped diamond films by X-ray diffraction profiles analysis

被引：14

作者：

Brunet, F ^{[1
]}

Germi, P ^{[1
]}

Pernet, M ^{[1
]}

机构：

[1] Universite Joseph Fourier, CNRS, Lab Cristallog, F-38042 Grenoble, France

来源：

THIN SOLID FILMS | 1998年 / 322卷 / 1-2期

关键词：

boron doped diamond films; X-ray diffraction pattern; line profile;

D O I：

10.1016/S0040-6090(97)00925-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A single-line analysis of X-ray diffraction patterns was improved to study the microstructure of boron doped diamond films. This analysis requires that an analytic function be ascribed to each reflection. Such a function must model the observed data as precisely as possible and should allow readily a separation of the breadth of convoluted functions. The line profile due to size effect is assumed to be a Cauchy function and the shape of the strain profile is taken as a Gauss function. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：143 / 147

页数：5

共 34 条

[11] MICRODISTORTION MEASUREMENT IN AU TEXTURED THIN-FILMS BY X-RAY-DIFFRACTION
DURAND, N
BIMBAULT, L
BADAWI, KF
GOUDEAU, P
[J]. JOURNAL DE PHYSIQUE III, 1994, 4 (06): : 1025 - 1032
[12] EFFECT OF BORON INCORPORATION ON THE QUALITY OF MPCVD DIAMOND FILMS
GHEERAERT, E
GONON, P
DENEUVILLE, A
ABELLO, L
LUCAZEAU, G
[J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) : 742 - 745
[13] IMAGING OF BORON DOPANT IN HIGHLY ORIENTED DIAMOND FILMS BY CATHODOLUMINESCENCE IN A TRANSMISSION ELECTRON-MICROSCOPE
GRAHAM, RJ
SHAAPUR, F
KATO, Y
STONER, BR
[J]. APPLIED PHYSICS LETTERS, 1994, 65 (03) : 292 - 294
[14] HADLER NC, 1965, ADV XRAY ANAL, V9
[15] SYNCHROTRON X-RAY-POWDER DIFFRACTION
HASTINGS, JB
THOMLINSON, W
COX, DE
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1984, 17 (APR) : 85 - 95
[16] Powder diffraction
Langford, JI
Louer, D
[J]. REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (02) : 131 - 234
[17] RAPID METHOD FOR ANALYZING BREADTHS OF DIFFRACTION AND SPECTRAL-LINES USING VOIGT FUNCTION
LANGFORD, JI
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1978, 11 (FEB) : 10 - 14
[18] The influence of boron doping on the structure and characteristics of diamond thin films
Liao, XZ
Zhang, RJ
Lee, CS
Lee, ST
Lam, YW
[J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) : 521 - 525
[19] MATHIES S, 1982, PHYS STATUS SOLIDI B, V112, pK111
[20] MEILUNAS R, 1990, P 2 INT C EL MAT MAT

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