Microstructural study of boron doped diamond films by X-ray diffraction profiles analysis

被引：14
作者：
Brunet, F [1 ]
Germi, P [1 ]
Pernet, M [1 ]
机构：
[1] Universite Joseph Fourier, CNRS, Lab Cristallog, F-38042 Grenoble, France
来源：
THIN SOLID FILMS | 1998年 / 322卷 / 1-2期
关键词：
boron doped diamond films; X-ray diffraction pattern; line profile;
D O I：
10.1016/S0040-6090(97)00925-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A single-line analysis of X-ray diffraction patterns was improved to study the microstructure of boron doped diamond films. This analysis requires that an analytic function be ascribed to each reflection. Such a function must model the observed data as precisely as possible and should allow readily a separation of the breadth of convoluted functions. The line profile due to size effect is assumed to be a Cauchy function and the shape of the strain profile is taken as a Gauss function. (C) 1998 Published by Elsevier Science S.A. All rights reserved.
引用
收藏
页码：143 / 147
页数：5
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