A highly integrated vertical SU8 valve for stepwise in-series reactions

被引:5
作者
Calvo, V. [1 ]
Ezkerra, A. [1 ]
Elizalde, J. [1 ]
Fernandez, L. J. [1 ]
Berganzo, J. [1 ]
Mayora, K. [1 ]
Ruano-Lopez, J. M. [1 ]
机构
[1] IKERLAN IK4 S Coop, MEMS Dept, E-20500 Arrasate Mondragon, Guipuzcoa, Spain
关键词
SAMPLE PREPARATION; DYNAMIC MICROPUMP; CHECK-VALVES; FABRICATION; DRIVEN; MICROSTRUCTURES; MICROCHANNELS; PUMP; AMPLIFICATION; MICROVALVES;
D O I
10.1088/0960-1317/21/6/065037
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Stepwise performance of reactions demands highly integrated microfluidic control. The vertical valve presented in this work allows performing reactions in cascade with reduced control requirements, by controlling the rupture of an SU8 wall that separates a chamber from an adjacent evacuation channel. Owing to its vertical construction, the valve can be readily integrated into any geometry with a low increase in footprint. Two valve approaches are presented, which differ in the location of the rupture region, the breaking pressures and the size of the fluidic path open. Breaking the wall about its upper end has proven to be more limited in terms of geometry and resulting gap size, whereas breaking the wall about its root opens a wider fluidic path that allows smooth filling of downstream chambers. Following these conclusions, a sequence of two reactions has been demonstrated, using a wall-valve-regulated double-chamber device. The chosen protocol, DNA concentration, elution and transport, has been successfully accomplished, as evidenced by positive on-chip polymerase chain reaction in a second double-chamber device.
引用
收藏
页数:9
相关论文
共 49 条
[21]   An on-chip air-bursting detonator for driving fluids on disposable lab-on-a-chip systems [J].
Hong, Chien-Chong ;
Choi, Jin-Woo ;
Ahn, Chong H. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (02) :410-417
[22]   A silicon-on-insulator based micro check valve [J].
Hu, M ;
Du, HJ ;
Ling, SF ;
Fu, YQ ;
Chen, QF ;
Chow, L ;
Li, B .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (03) :382-387
[23]   Surface micromachined thermally driven micropump [J].
Jang, WI ;
Choi, CA ;
Jun, CH ;
Kim, YT ;
Esashi, M .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 115 (01) :151-158
[24]   Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts [J].
Khoo, HS ;
Liu, KK ;
Tseng, FG .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (06) :822-831
[25]   The dynamic micropump driven with a screen printed PZT actuator [J].
Koch, M ;
Evans, AGR ;
Brunnschweiler, A .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1998, 8 (02) :119-122
[26]   Simulation and fabrication of micromachined cantilever valves [J].
Koch, M ;
Evans, AGR ;
Brunnschweiler, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) :756-759
[27]   A simple, valveless microfluidic sample preparation device for extraction and amplification of DNA from nanoliter-volume samples [J].
Legendre, LA ;
Bienvenue, JM ;
Roper, MG ;
Ferrance, JP ;
Landers, JP .
ANALYTICAL CHEMISTRY, 2006, 78 (05) :1444-1451
[28]   Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel [J].
Li, B ;
Chen, QF .
SENSORS AND ACTUATORS A-PHYSICAL, 2006, 126 (01) :187-193
[29]  
Liu G, 2005, MICROSYST TECHNOL, V11, P343, DOI [10.1007/s00542-004-0452-x, 10.1007/S00542-004-0452-X]
[30]   Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection [J].
Liu, RH ;
Yang, JN ;
Lenigk, R ;
Bonanno, J ;
Grodzinski, P .
ANALYTICAL CHEMISTRY, 2004, 76 (07) :1824-1831